The first domestic technology of autonomous intellectual property rights: using grating sensors to meet the measurement of roughness and contour size at the same time Use the interference to scan the grid ruler, which can reach 1nm, which can meet the super high precision measurement Ultra -high resolution sensor can meet the measurement of roughness and contour dimensions at the same time. No need to change the sensor during the measurement process A large number of processes and high precision are compatible, which can meet the integrated measurement of irregular surface roughness and size such as arc surface, column surface, free curved surface The unique roughness evaluation algorithm and position compensation method, effective correction and compensation surface measurement is the measurement error of non -plane, and effectively guarantee the roughness of the curved surface, the roughness of the arc workpiece as high accuracy and high accuracy as the plane roughness. No need to modify mathematical methods and close to zero friction coefficient rails, which can maintain a high -precision measurement benchmark for a long time. The accuracy is consistent.