Model |
ST-100 |
ST-200 |
ST-300 |
Camera |
20MP Black and White Digital |
12MP Black and White + 8MP color Digital camera |
Monitor |
11.6 inch LCD Monitor(WXGA:1920*1080) |
Lens |
Bitelecentric lens |
Image Measurement |
FOV |
Wide-field measurement mode |
- |
200mm×200mm |
300 mm×200mm |
High-precision measurement mode |
82mm×55mm |
140 mm×154mm |
240 mm×154mm |
Resolution |
0.1 μm |
Measuring accuracy |
Wide-field measurement mode |
Without stage movement |
±2.0μm |
With StageMovement |
- |
±(2.0+L/50 ) um |
High-precision measurement mode |
Without stage movement |
±1.5μm |
With StageMovement |
- |
±(1.3+L/50)um |
Repeat accuracy |
Wide-field measurement mode |
Without stage movement |
±1.5μm |
With StageMovement |
- |
±2.0μm |
High-precision measurement mode |
Without stage movement |
±1.5μm |
With StageMovement |
- |
±1.5μm |
Environment |
Temperature |
10 to 35 degree |
Humidity |
20-80%RH(No condensation) |
Pollution level |
2 |
Overvoltage category |
II |
Lighting system |
Transparent |
Telecentric transparent illumination |
Surface light |
Multi-angle lighting(motorized) |
XY Stage |
Moving Range |
- |
120 mmx140 mm (motorized) |
220mm×140mm (motorized) |
Withstand load |
3kg |
5kg |
Z stage |
Moving Range |
75 mm(motorized) |
Voltage |
Power voltage |
100-240 VAC±10% 50/60Hz |
Power consumption |
under 430VA |
under 800VA |
Weight |
Net weight |
28kg |
35kg |